Thermal scanning probe lithography

Thermal scanning probe lithography (tSPL) is a nanofabrication method for the chemical and physical nanopatterning of large variety materials polymer resists with lateral resolution 10 nm depth 1 nm. In this Primer, we describe working principles tSPL highlight characteristics that make it powerful tool to locally directly modify material properties in ambient conditions. We introduce main features tSPL, which can pattern surfaces by delivering heat using nanosized thermal probes. define most critical patterning parameters post-patterning analysis obtained results. The sources reproducibility issues related sample as well limitations technique are discussed together mitigation strategies. applications covered Primer include those biomedicine, nanomagnetism nanoelectronics; specifically, cover fabrication gradients, tissue-mimetic surfaces, spin wave devices field-effect transistors based on two-dimensional materials. Finally, provide an outlook new strategies improve future research next-generation devices. resists. Riedo colleagues